Scientific Motion Wafer Cleaner

Wafer Cleaner – This tool incorporates a SCADA robot arm to transfer silicon wafers from a ‘boat’ to a rinsing station, where a vacuum chuck holds the wafer while it is spun up to speed in the cleaning process. ISI worked with Scientific Motion to write the software controlling the automation process. As with the Wafer Indexer, ISI does final assembly and comprehensive testing of these tools before packaging and shipping them on behalf of SciMo.

See a video of it in action here.